| 000 | 00412nam a22001337a 4500 | ||
|---|---|---|---|
| 005 | 20240430120949.0 | ||
| 008 | 240430b |||||||| |||| 00| 0 eng d | ||
| 082 |
_a621SAC _bSAC |
||
| 100 | _aSachin Balu Rathod | ||
| 245 |
_aAdvancing Parallel Kinematic Nano Positioning Scanner with Stiffness Optimized Flexure Beams _cSachin Balu Rathod |
||
| 260 | _c30-4-2024 | ||
| 700 | _aSachin Balu Rathod | ||
| 942 |
_2ddc _cTD |
||
| 999 |
_c2110 _d2110 |
||