000			01372nam a22002057a 4500
005			20240215145322.0
008			231226b |||||||| |||| 00| 0 eng d
020			_a9788126540822
041			_heng
082			_a621.381 _b GAR
100			_aGardner,Julian W.
245			_aMicrosensors Mems And Smart Devices _c
260			_aDelhi _bWiley india Pvt. Ltd _c2001
300			_axvi, 503 p
505			_tIntroduction Electronic Materials and Processing MEMS Materials and their Preparation Standard Microelectronic Technologies Silicon Micromachining:Bulk Silicon Micromachining: Surface Microstereolithography for MEMS Microsensors Introduction to SAW Devices Surface Acoustic Waves in Solids IDT Microsensor Parameter Measurement IDT Microsensor Fabrication IDT Microsensors MEMS-IDT Microsensors Smart Sensors and MEMS Appendices Index
520			_aFrom smart wallpaper designed to reduce noise in helicopters to the electronic tongues used in the food industry, smart devices are having a growing impact. Gardner and Varadan report on recent developments in both the integration of a micro sensor and its microelectronic circuitry to produce a smart sensor ant the integration of a micro sensor, a Microactuators and their microelectronic circuitry to produce a microsystem.
700			_aVaradan,Vijay K
700			_aAwadelkarim,Osama O
942			_2ddc _cBK
999			_c2026 _d2026