000 00307nam a22001097a 4500
005 20231025113324.0
008 231025b |||||||| |||| 00| 0 eng d
082 _a621
_bDES
100 _a119ME0005,119ME0037
245 _aDesigning of Nano Positioning Flexure Based Stage
_c119ME0005,119ME0037
942 _2ddc
_cTD
999 _c1988
_d1988