Introduction Electronic Materials and Processing MEMS Materials and their Preparation Standard Microelectronic Technologies Silicon Micromachining:Bulk Silicon Micromachining: Surface Microstereolithography for MEMS Microsensors Introduction to SAW Devices Surface Acoustic Waves in Solids IDT Microsensor Parameter Measurement IDT Microsensor Fabrication IDT Microsensors MEMS-IDT Microsensors Smart Sensors and MEMS Appendices Index

From smart wallpaper designed to reduce noise in helicopters to the electronic tongues used in the food industry, smart devices are having a growing impact. Gardner and Varadan report on recent developments in both the integration of a micro sensor and its microelectronic circuitry to produce a smart sensor ant the integration of a micro sensor, a Microactuators and their microelectronic circuitry to produce a microsystem.