MARC details
| 000 -LEADER |
|---|
| fixed length control field |
03569cam a22004214a 4500 |
| 001 - CONTROL NUMBER |
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| control field |
14123478 |
| 005 - DATE AND TIME OF LATEST TRANSACTION |
|---|
| control field |
20221209125418.0 |
| 008 - FIXED-LENGTH DATA ELEMENTS--GENERAL INFORMATION |
|---|
| fixed length control field |
050928s2006 njua b 001 0 eng |
| 010 ## - LIBRARY OF CONGRESS CONTROL NUMBER |
|---|
| LC control number |
2005028448 |
| 015 ## - NATIONAL BIBLIOGRAPHY NUMBER |
|---|
| National bibliography number |
GBA627486 |
| Source |
bnb |
| 016 7# - NATIONAL BIBLIOGRAPHIC AGENCY CONTROL NUMBER |
|---|
| Record control number |
013414729 |
| Source |
Uk |
| 020 ## - INTERNATIONAL STANDARD BOOK NUMBER |
|---|
| International Standard Book Number |
0471784060 |
| 020 ## - INTERNATIONAL STANDARD BOOK NUMBER |
|---|
| International Standard Book Number |
9780471784067 |
| 035 ## - SYSTEM CONTROL NUMBER |
|---|
| System control number |
(OCoLC)ocm61821738 |
| 040 ## - CATALOGING SOURCE |
|---|
| Original cataloging agency |
DLC |
| Transcribing agency |
DLC |
| Modifying agency |
UKM |
| -- |
BAKER |
| -- |
C#P |
| -- |
COO |
| -- |
DLC |
| 042 ## - AUTHENTICATION CODE |
|---|
| Authentication code |
pcc |
| 082 00 - DEWEY DECIMAL CLASSIFICATION NUMBER |
|---|
| Classification number |
621.3815 |
| Edition number |
22 |
| Item number |
MAY |
| 100 1# - MAIN ENTRY--PERSONAL NAME |
|---|
| Personal name |
May, Gary S. |
| 245 10 - TITLE STATEMENT |
|---|
| Title |
Fundamentals of semiconductor manufacturing and process control / |
| Statement of responsibility, etc. |
Gary S. May, Costas J. Spanos. |
| 260 ## - PUBLICATION, DISTRIBUTION, ETC. |
|---|
| Place of publication, distribution, etc. |
[Piscataway] : |
| Name of publisher, distributor, etc. |
IEEE ; |
| Place of publication, distribution, etc. |
Hoboken, N.J. : |
| Name of publisher, distributor, etc. |
Wiley-Interscience, |
| Date of publication, distribution, etc. |
c2006. |
| 300 ## - PHYSICAL DESCRIPTION |
|---|
| Page number |
xix, 463 p. : |
| Other physical details |
ill. ; |
| Dimensions |
25 cm. |
| 505 ## - FORMATTED CONTENTS NOTE |
|---|
| Title |
Introduction to semiconductor manufacturing<br/> |
| -- |
Technology overview<br/> |
| -- |
Process monitoring<br/> |
| -- |
Statistical fundamentals<br/> |
| -- |
Yield modeling<br/> |
| -- |
Statistical process control<br/> |
| -- |
Statistical experimental design<br/> |
| -- |
Process modeling<br/> |
| -- |
Advanced process control<br/> |
| -- |
Process and equipment diagnosis |
| 520 ## - SUMMARY, ETC. |
|---|
| Summary, etc. |
A practical guide to semiconductor manufacturing from process control to yield modeling and experimental design<br/><br/>Fundamentals of Semiconductor Manufacturing and Process Control covers all issues involved in manufacturing microelectronic devices and circuits, including fabrication sequences, process control, experimental design, process modeling, yield modeling, and CIM/CAM systems. Readers are introduced to both the theory and practice of all basic manufacturing concepts.<br/><br/>Following an overview of manufacturing and technology, the text explores process monitoring methods, including those that focus on product wafers and those that focus on the equipment used to produce wafers. Next, the text sets forth some fundamentals of statistics and yield modeling, which set the foundation for a detailed discussion of how statistical process control is used to analyze quality and improve yields.<br/><br/>The discussion of statistical experimental design offers readers a powerful approach for systematically varying controllable process conditions and determining their impact on output parameters that measure quality. The authors introduce process modeling concepts, including several advanced process control topics such as run-by-run, supervisory control, and process and equipment diagnosis.<br/><br/>Critical coverage includes the following:<br/>* Combines process control and semiconductor manufacturing<br/>* Unique treatment of system and software technology and management of overall manufacturing systems<br/>* Chapters include case studies, sample problems, and suggested exercises<br/>* Instructor support includes electronic copies of the figures and an instructor's manual |
| 650 #0 - SUBJECT ADDED ENTRY--TOPICAL TERM |
|---|
| Topical term or geographic name entry element |
Semiconductors |
| 650 #0 - SUBJECT ADDED ENTRY--TOPICAL TERM |
|---|
| Topical term or geographic name entry element |
Integrated circuits |
| 650 #0 - SUBJECT ADDED ENTRY--TOPICAL TERM |
|---|
| Topical term or geographic name entry element |
Process control |
| 700 1# - ADDED ENTRY--PERSONAL NAME |
|---|
| Personal name |
Spanos, Costas J. |
| 942 ## - ADDED ENTRY ELEMENTS (KOHA) |
|---|
| Source of classification or shelving scheme |
Dewey Decimal Classification |
| Koha item type |
Books |
| 504 ## - BIBLIOGRAPHY, ETC. NOTE |
|---|
| Bibliography, etc. note |
Includes bibliographical references and index. |
| 650 #0 - SUBJECT ADDED ENTRY--TOPICAL TERM |
|---|
| General subdivision |
Design and construction. |
| 650 #0 - SUBJECT ADDED ENTRY--TOPICAL TERM |
|---|
| General subdivision |
Design and construction. |
| 650 #0 - SUBJECT ADDED ENTRY--TOPICAL TERM |
|---|
| General subdivision |
Statistical methods. |
| 856 41 - ELECTRONIC LOCATION AND ACCESS |
|---|
| Materials specified |
Table of contents |
| Uniform Resource Identifier |
<a href="http://www.loc.gov/catdir/toc/ecip061/2005028448.html">http://www.loc.gov/catdir/toc/ecip061/2005028448.html</a> |
| 856 42 - ELECTRONIC LOCATION AND ACCESS |
|---|
| Materials specified |
Publisher description |
| Uniform Resource Identifier |
<a href="http://www.loc.gov/catdir/enhancements/fy0660/2005028448-d.html">http://www.loc.gov/catdir/enhancements/fy0660/2005028448-d.html</a> |
| 856 42 - ELECTRONIC LOCATION AND ACCESS |
|---|
| Materials specified |
Contributor biographical information |
| Uniform Resource Identifier |
<a href="http://www.loc.gov/catdir/enhancements/fy0740/2005028448-b.html">http://www.loc.gov/catdir/enhancements/fy0740/2005028448-b.html</a> |
| 906 ## - LOCAL DATA ELEMENT F, LDF (RLIN) |
|---|
| a |
7 |
| b |
cbc |
| c |
orignew |
| d |
1 |
| e |
ecip |
| f |
20 |
| g |
y-gencatlg |
| 952 ## - LOCATION AND ITEM INFORMATION (KOHA) |
|---|
| -- |
5741 |
